Stacked Serial Kinematics Flexure
Nanopositioning System
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Simple Design, but:
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Slower response (lower stage
carries inertial mass of upper stage);
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Non-symmetric resonant frequencies
(lower stage is slower than upper stage, requires different servo settings).
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Orthogonality error is mounting-angle
dependant.
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Runout in Y cannot be monitored/compensated
by the sensor in the X stage or vice versa.
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Nested Serial Kinematics Flexure
Nanopositioning System
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Thinner and better response than Stacked Serial Kinematics, but no other advantages
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Parallel Kinematics
Flexure Nanopositioning System
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Same ultra-low inertia for
X and Y motion, providing higher responsiveness and axis-independent performance.
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Excellent, mounting independent
orthogonality.
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Reduced runout: X sensor (PI
uses non-contact two plate capacitance sensors) can monitor and correct
for Y runout and vice versa (Active
Trajectory Control).
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Additional rotation axis (Theta
Z) feasible with 3 actuators / sensors and digital controller.
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