Vacuum Compatible 6-Axis Hexapod Positioners
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PI is the world leader in precision Hexapod Stewart platform system design. PI's core business is ultra-precision motion control. With more than 700 employees world wide, 40 years of experience in motion control and more than two decades of hexapod mechanics, controller and software design experience, PI can get you up to speed significantly faster than anybody else. PI recently acquired miCos, another motion control specialist with hexapod parallel kinematics design experience, and a broad product offering of high-vacuum and ultra-high-vacuum (UHV) precision positioning systems.

PI's electro-mechanical and piezoelectric Hexapod (Stewart-Gough) platform positioners have many advantages over hydraulic hexapods. They are smaller, offer much higher precision and most are self locking. Available in many sizes, configurations for loads from 2 kg to more than 1000 kg.

 

Most of the following Hexapod Platforms are standard catalog products.
Click here for additional High Force Hexapods, Special & Non-Magnetic Hexapods.


H-811.STV Small Vacuum Hexapod
M-811 Small Vacuum Hexapod
  • Miniature High Precision Hexapod
  • 6 Axis Positioning System with Controller & Software
  • 5 kg Load
  • Actuator Resolution 0.04 µm
  • Repeatability up to ±0.2 µm
  • Velocity to 10 mm/s
  • Diameter: 136 mm, Height: 114 mm
  • Linear Travel Ranges 34 x 32 x 13 mm
  • Rotation to 42°
PDF Datasheets | Specs / Drawings | Ordering Info |




H-824 Compact Vacuum Hexapod
  • Six Degrees of Freedom
  • Vacuum Compatible Versions
  • Load Capacity 10 kg
  • Travel Ranges to 45 mm (linear), 25° (rotation)
  • 7 Nanometer Resolution
  • 300 Nanometer Min. Incremental Motion
  • Repeatability ±0.5 Micron
  • Very Compact Design
  • Self Locking to 10 kg
PDF Datasheets | Product Description | Specs / Drawings | Ordering Info |




M-850K Custom Vacuum Hexapod 6-Axis Positioner for Wide Temperature Range
Hexapod for Wide Temperature Range
  • 6 Degrees of Freedom, Works in Any Orientation
  • Vacuum Compatible up to 10-6 hPa
  • 200 kg Load Capacity (Vertical)
  • Repeatability to ±1 µm
  • Encoder Resolution to 5 nm
Back to TopPDF Datasheets | Product Description | Specs / Drawings | Ordering Info |




H-840 HexaLight™ Six-Axis Parallel Kinematics Microrobot
HexaLight 6-Axis-Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • Rapid Response
  • No Moving Cables for Improved Reliability and Precision
  • 30 kg Load Capacity
  • Repeatability to ±2 Micron
  • Actuator Resolution to 0.016 Micron
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions
  • Virtualized Pivot Point
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
PDF Datasheets | Product Description | Specs / Drawings | Ordering Info |




H-850.V50 High Load Vacuum Hexapod to 10-6 hPa
M-850 Hexapod
  • Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • 200 kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±1 Micron
  • Actuator Resolution to 0.005 Micron
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Compatible Versions
  • Linear and Rotary Multi-Axis Scans
  • Virtualized Center of Rotation (Pivot Point)
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
Back to Top     PDF Datasheets | Product Description | Specs / Drawings | Ordering Info |




Custom Vacuum Compatible, Non-Magnetic Hexapods
NEXLINE® Vacuum Hexapod
NEXLINE Vacuum Hexapod
  • Precision Vacuum Hexapod
  • Based on Non-magnetic PiezoWalk Linear Piezo Motor Principle
  • Controller with coordinate transformation shown in background
PDF Datasheet | More Information |




P-911k Custom Miniature Vacuum & Non-Magnetic Hexapod
Miniature NEXLINE Hexapod
  • Precision Miniature Vacuum Hexapod
  • Based on Non-magnetic PiezoWalk Linear Piezo Motor Principle
PDF Datasheet | Request More Information |




SpaceFAB Parallel 6-Axis Motorized Positioning Systems from PI miCos
  • Ultra High Vacuum Versions (10-9 mBar)
  • Long Linear Travel Ranges
  • Flexible Arrangement, Easy Customization
  • Many Drive and Motor Options
SpaceFab 6 Axis Precision Motorized Positioner for Vacuum




PI miCos Brochure (PDF): Ultra High Vacuum (UHV) Precision Positioning Systems

More Vacuum & Non-Magnetic Custom Hexapods


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